Hey eloggers,
I am setting up an ELOG to log the cleanroom fabrication in our startup (Luxtelligence SA). The fabrication is structured in different process steps that are performed by several wafers at the same time (each wafer as an ID).
I am looking for an possibility to put a list of several integers as one of the attributes.
Here an example:
Attributes = Batch ID, Wafer IDs
Type Batch ID = numeric
Type Wafer IDs = extendable list of numeric values
Does something like this exsist?
Thanks in advance for your help. |